Conference paper

Simulation and design of a three axis navigation microsystem based on micromachined sensors

The project presented in this paper aims at defining the limits of microsystems through the realisation of a navigation system based on inertial microsensors. The work includes (i) design, fabrication, characterisation of accelerometers and angular rate sensors, (ii) development of techniques for simulation of sensor behaviour, and (iii) design of a sensor data processing system.


    • LMIS4-CONF-1998-001

    Record created on 2005-09-13, modified on 2016-08-08


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