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SU-8: a low-cost negative resist for MEMS
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SU-8: a low-cost negative resist for MEMS
-
Lorenz, Hubert
et al
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Lorenz_JMM7_1997_SU8
version 1
Lorenz_JMM7_1997_SU8.pdf
[636.88 KB]
27 Jan 2018, 12:22
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