Loading...
conference paper
Simple and low cost fabrication of embedded microchannels by using a new thick-film photoplastic
1997
TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS
In this paper we describe new ways to realise micro-channels. The used technologies are based on a novel thick-film photoplastic, the SU-8. This photoresist has outstanding properties, allowing the realisation of high aspect ratio microstructures. It is a simple and low-cost fabrication process. The micro channels developed in this work it will be used for the realisation of thermal flow-sensors.
Loading...
Name
Guerin_Transducers97_SU8channels.PDF
Access type
restricted
Size
1.26 MB
Format
Adobe PDF
Checksum (MD5)
3a531c1b6e381b8f0fd79c313b53eb03