Conference paper

Capacitive detection method evaluation physical parameter extraction from finite element for silicon accelerometer by simulations

A capacitance evaluation method based on the extraction of physical parameters from finite element (FE) analysis is presented. Mechanical simulations and this capacitance evaluation method were applied to a new, highly symmetrical, silicon accelerometer in view of globaly modeling the sensor system. The commercial hardware description language HDL-A(TM) is used to develop a compact behavioral macromodels for SPICE simulators.


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