Capacitive detection method evaluation physical parameter extraction from finite element for silicon accelerometer by simulations

A capacitance evaluation method based on the extraction of physical parameters from finite element (FE) analysis is presented. Mechanical simulations and this capacitance evaluation method were applied to a new, highly symmetrical, silicon accelerometer in view of globaly modeling the sensor system. The commercial hardware description language HDL-A(TM) is used to develop a compact behavioral macromodels for SPICE simulators.


Published in:
SISPAD '97 - 1997 INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES, 1, 129-132
Presented at:
1997 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 97), CAMBRIDGE, MA, SEP 08-10, 1997
Year:
1997
Laboratories:




 Record created 2005-09-13, last modified 2018-07-07


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