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conference paper
Capacitive detection method evaluation physical parameter extraction from finite element for silicon accelerometer by simulations
1997
SISPAD '97 - 1997 INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES
A capacitance evaluation method based on the extraction of physical parameters from finite element (FE) analysis is presented. Mechanical simulations and this capacitance evaluation method were applied to a new, highly symmetrical, silicon accelerometer in view of globaly modeling the sensor system. The commercial hardware description language HDL-A(TM) is used to develop a compact behavioral macromodels for SPICE simulators.
Type
conference paper
Web of Science ID
WOS:A1997BJ53T00032
Authors
Publication date
1997
Published in
SISPAD '97 - 1997 INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES
Volume
1
Start page
129
End page
132
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
CAMBRIDGE, MA | SEP 08-10, 1997 | |
Available on Infoscience
September 13, 2005
Use this identifier to reference this record