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conference paper
From simple devices to promising microsystem applications
1997
1997 21ST INTERNATIONAL CONFERENCE ON MICROELECTRONICS - PROCEEDINGS, VOLS 1 AND 2
We discuss both limitations and potentialities of micromechanical devices based on simple microtechnologies. We briefly review flow sensors and their applications. Underlying technologies and prospective applications are discussed.
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Lerch_MIEL97.pdf
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536.45 KB
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