Modelization and characterization of asymmetrical thermal micro-actuators

Structures of very high aspect ratio which are mechanically stiff in the substrate direction and flexible in the direction parallel to the substrate are studied. Such structures can be exploited to produce thermal flexure actuators which are capable of large motion produced by thermal expansion. The magnitude of the deflection depends strongly on geometry and material properties. Structures fabricated by laser micro-machining are characterized and compared to numerical simulations.


Publié dans:
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 6, 1, 134-137
Année
1996
Laboratoires:


Note: Le statut de ce fichier est: Seulement EPFL


 Notice créée le 2005-09-13, modifiée le 2020-07-30

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