Modelization and characterization of asymmetrical thermal micro-actuators

Structures of very high aspect ratio which are mechanically stiff in the substrate direction and flexible in the direction parallel to the substrate are studied. Such structures can be exploited to produce thermal flexure actuators which are capable of large motion produced by thermal expansion. The magnitude of the deflection depends strongly on geometry and material properties. Structures fabricated by laser micro-machining are characterized and compared to numerical simulations.


Published in:
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 6, 1, 134-137
Year:
1996
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2005-09-13, last modified 2018-03-17

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