A 4-degrees-of-freedom microrobot with nanometer resolution

A new type of microrobot is described. Its simple and compact design is believed to be of promise in the microrobotics field. Stepping motion allows speeds up to 4mm/s. Resolution smaller than 10 nm is achievable. Experiments in an open- loop motion demonstrated a repeatability better than 50 mu m on a 10 mm displacement at an average speed of 0.25 mm/s. A position feedback based on a microvision system will be developed in order to achieve a submicron absolute position accuracy.


Publié dans:
ROBOTICA, 14, 199-203
Année
1996
ISSN:
0263-5747
Mots-clefs:
Note:
National Licences
Laboratoires:


Note: Le statut de ce fichier est: Anyone


 Notice créée le 2005-09-13, modifiée le 2020-07-30

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