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research article

A 4-degrees-of-freedom microrobot with nanometer resolution

Breguet, JM
•
Renaud, Philippe  
1996
ROBOTICA

A new type of microrobot is described. Its simple and compact design is believed to be of promise in the microrobotics field. Stepping motion allows speeds up to 4mm/s. Resolution smaller than 10 nm is achievable. Experiments in an open- loop motion demonstrated a repeatability better than 50 mu m on a 10 mm displacement at an average speed of 0.25 mm/s. A position feedback based on a microvision system will be developed in order to achieve a submicron absolute position accuracy.

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S026357470001910X.pdf

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Publisher's Version

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http://purl.org/coar/version/c_970fb48d4fbd8a85

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openaccess

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387.83 KB

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Adobe PDF

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ce8c661944dad2cdbe03d46a76af06a9

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