Etude des plasmas organosiliciés dilués en oxygène utilisés pour la déposition d'oxyde de silicium


Advisor(s):
Hollenstein, Christoph
Year:
2001
Publisher:
Lausanne, EPFL
Laboratories:
SPC
CRPP


Note: The status of this file is: EPFL only


 Record created 2005-03-16, last modified 2018-01-27

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