research article
Atomic force microscope topographical artifacts after the dielectric breakdown of ultrathin SiO2 films
2003
Type
research article
Author(s)
Date Issued
2003
Published in
Volume
532-535
Start page
727
End page
731
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 29, 2024
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