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patent

Bodily implant microelectrode and bodily implant microelectrode fabrication method

Barbruni, Gian Luca  
•
Ghezzi, Diego  
•
Carrara, Sandro  
2024

The present invention concerns a bodily implantable or probe device and microelectrode fabrication method comprising providing at least one silicon substrate including an electronic device or unit; providing, on a first side of the silicon substrate, at least one conducting material for forming at least one elongated electrical channel of the microelectrode; providing an insulator material on the conducting material to define at least one active site or area of the microelectrode, providing a protection material or layer onto the first side of the silicon substrate or layer; etching the silicon material of a second side of the silicon substrate to form at least one elongated projection extending away from the silicon substrate, the elongated projection comprising the conducting material, and expose an elongated surface of the conducting material of the elongated projection; removing the protection material or layer from the first side of the silicon substrate; and providing a further insulator material on the exposed elongated surface of the conducting material to isolate the elongated electrical channel of the at least one microelectrode, and providing the further insulator material on the etched at least one silicon substrate.

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Type
patent
EPO Family ID

84358833

Author(s)
Barbruni, Gian Luca  
Ghezzi, Diego  
Carrara, Sandro  
Note

Alternative title(s) : (fr) Microélectrode d'implant corporel et procédé de fabrication associé

TTO classification

TTO:6.2352

EPFL units
AVP-R-TTO  
DOICountry codeKind codeDate issued

WO2024084265

WO

A1

2024-04-25

Available on Infoscience
May 6, 2024
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/207833
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