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  4. Measuring electrical properties in semiconductor devices by pixelated STEM and off-axis electron holography (or convergent beams vs. plane waves).
 
research article

Measuring electrical properties in semiconductor devices by pixelated STEM and off-axis electron holography (or convergent beams vs. plane waves).

Cooper, David
•
Bruas, Lucas
•
Bryan, Matthew
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February 9, 2024
Micron

We demonstrate the use of both pixelated differential phase contrast (DPC) scanning transmission electron microscopy (STEM) and off-axis electron holography (EH) for the measurement of electric fields and assess the advantages and limitations of each technique when applied to technologically relevant samples. Three different types of samples are examined, firstly a simple highly-doped Si pn junction. Then a SiGe superlattice is examined to evaluate the effects of the mean inner potential on the measured signal. Finally, an InGaN/GaN microwire light-emitting diode (LED) device is examined which has a polarization field, variations of mean inner potential and a wurtzite crystal lattice. We discuss aspects such as spatial resolution and sensitivity, and the concept of pseudo-field is defined. However, the most important point is the need to limit the influence of diffraction contrast to obtain accurate measurements. In this respect, the use of a plane electron wave for EH is clearly beneficial when compared to the use of a convergent beam for pixelated DPC STEM.

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Type
research article
DOI
10.1016/j.micron.2024.103594
Web of Science ID

WOS:001183468700001

Author(s)
Cooper, David
Bruas, Lucas
Bryan, Matthew
Boureau, Victor  
Date Issued

2024-02-09

Publisher

Pergamon-Elsevier Science Ltd

Published in
Micron
Volume

179

Article Number

103594

Subjects

Technology

•

Electron Holography

•

4D Stem

•

Differential Phase Contrast

•

Semiconductors

•

Electric Field

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CIME  
FunderGrant Number

Recherches Technologiques de Base" program of the French National Research Agency (ANR)

Available on Infoscience
April 3, 2024
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/206921
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