Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors
The unique mechanical and electrical properties of graphene make it an exciting material for nanoelectromechanical systems (NEMS). NEMS resonators with graphene springs facilitate studies of graphene's fundamental material characteristics and thus enable innovative device concepts for applications such as sensors. Here, we demonstrate resonant transducers with ribbon-springs made of double-layer graphene and proof masses made of silicon and study their nonlinear mechanics at resonance both in air and in vacuum by laser Doppler vibrometry. Surprisingly, we observe spring-stiffening and spring-softening at resonance, depending on the graphene spring designs. The measured quality factors of the resonators in a vacuum are between 150 and 350. These results pave the way for a class of ultraminiaturized nanomechanical sensors such as accelerometers by contributing to the understanding of the dynamics of transducers based on graphene ribbons with an attached proof mass.
WOS:001143432000001
2023-12-01
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Funder | Grant Number |
National Outstanding Youth Science Fund Project of National Natural Science Foundation of China | 62171037 |
National Natural Science Foundation of China | 4232076 |
Beijing Natural Science Foundation | 2DNEMS |
National Science Fund for Excellent Young Scholars (Overseas) | 2019-03412 |
Swedish Research Council (VR) | 2015-05112 |
Swedish Research Council | 2021TLQT012 |
Beijing Institute of Technology Teli Young Fellow Program | |
Beijing Institute of Technology Science and Technology Innovation Plan | PP00P2_170590 |
Swiss National Science Foundation | |