Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Surfactant behavior and limited incorporation of indium during in situ doping of GeSn grown by molecular beam epitaxy
 
research article

Surfactant behavior and limited incorporation of indium during in situ doping of GeSn grown by molecular beam epitaxy

Giunto, Andrea  
•
Webb, Louise E.
•
Hagger, Thomas  
Show more
July 17, 2023
Physical Review Materials

GeSn is a promising group-IV semiconductor material for on-chip Si photonics devices and high-mobility transistors. These devices require the use of doped GeSn regions, achieved preferably in situ during epitaxy. From the electronic valence point of view, p-type dopants of group-IV materials include B, Al, Ga, and In. The latter element has never been investigated as p-type dopant in GeSn. In this work, we explore in situ In p-type doping of GeSn grown by molecular beam epitaxy. We demonstrate that In acts as a surfactant during epitaxial growth of GeSn:In, accumulating on surface and inducing Sn segregation in the form of mobile Sn-In liquid droplets, strongly affecting the local composition of the material. In nondefective GeSn, we measure a maximal In incorporation of 2.8 x 1018 cm-3, which is two orders of magnitude lower than the values reported in the literature for in situ p-type doping of GeSn. We further show that In induces the nucleation of defects at low growth temperatures, hindering out-of-equilibrium growth processes for maximization of dopant incorporation. This work provides insights on the limitations associated with in situ In doping of GeSn and discourages its utilization in GeSn-based optoelectronic devices.

  • Details
  • Metrics
Type
research article
DOI
10.1103/PhysRevMaterials.7.074605
Web of Science ID

WOS:001051437300002

Author(s)
Giunto, Andrea  
Webb, Louise E.
Hagger, Thomas  
Fontcuberta i Morral, Anna  
Date Issued

2023-07-17

Publisher

AMER PHYSICAL SOC

Published in
Physical Review Materials
Volume

7

Issue

7

Article Number

074605

Subjects

Materials Science, Multidisciplinary

•

Materials Science

•

silicon

•

temperature

•

alloys

•

nucleation

•

germanium

•

tin

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMSC  
Available on Infoscience
September 11, 2023
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/200448
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés