Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. A Front-End CMOS Interface Circuit With High Voltage Charge Pump and Oscillator for Capacitive Micromachined Ultrasonic Transducers
 
research article

A Front-End CMOS Interface Circuit With High Voltage Charge Pump and Oscillator for Capacitive Micromachined Ultrasonic Transducers

Zhao, Yihe
•
Barbruni, Gian Luca  
•
Li, Zhikang
Show more
May 1, 2023
Ieee Transactions On Circuits And Systems Ii-Express Briefs

Label-free biosensors, combined with miniaturized micro-electromechanical sensory platforms, offer an attractive solution for real-time and facile monitoring of biomolecules due to their high sensitivity and selectivity without the need for specifically labeling. Resonators have been acknowledged as an efficient technology for measuring biomolecular binding events including those involving nucleic acid and antibody. Among these, capacitive micromachined ultrasonic transducers (CMUTs) have emerged as a promising candidate for biosensing. However, their usage is often limited by the requirement for high voltage supply and continuous frequency tracking, which can result in significant parasitic effects and measurement errors. In this brief, we present a novel front-end interface circuit for a CMUTs-based biosensor. The circuit, fabricated using TSMC 0.18-mu m BipolarCMOS-DMOS (BCD) technology, incorporates an on-chip high voltage charge pump and feedback frequency monitoring. The CMUTs array features 20 x 20 circular cells, fabricated using a low-temperature direct bonding technology, with an experimental parallel-resonant frequency of 1.724 MHz and a high quality factor of up to 40.9. To fit the measured electrical characteristics, a five-element equivalent lumped element model is proposed. The high voltage charge pump provides an output voltage of similar to 20 V, while the feedback oscillator has a ms-level start-up time and a total power dissipation of 3.8 mW. The proposed frontend interface is designed to function as a stand-alone chip for CMUTs-based resonant biodetection.

  • Details
  • Metrics
Type
research article
DOI
10.1109/TCSII.2023.3261061
Web of Science ID

WOS:000988497300027

Author(s)
Zhao, Yihe
Barbruni, Gian Luca  
Li, Zhikang
Zhao, Libo
Wang, Xiaozhang
Wang, Kaifei
Jiang, Zhuangde
Carrara, Sandro  
Date Issued

2023-05-01

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

Published in
Ieee Transactions On Circuits And Systems Ii-Express Briefs
Volume

70

Issue

5

Start page

1799

End page

1803

Subjects

Engineering, Electrical & Electronic

•

Engineering

•

resonant frequency

•

oscillators

•

resonators

•

biosensors

•

sensitivity

•

high-voltage techniques

•

ultrasonic transducers

•

capacitive micromachined ultrasonic transducers (cmuts)

•

high voltage charge pump

•

feedback oscillator

•

application-specific integrated circuit (asic)

•

resonant chemical sensor

•

co2

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LSI1  
Available on Infoscience
July 3, 2023
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/198689
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés