A 3D-Printed Functional Mems Accelerometer
Pagliano, Simone; Marschner, David E.; Maillard, Damien; Ehrmann, Nils; Stemme, Goran; Braun, Stefan; Villanueva, Luis Guillermo; Niklaus, Frank
2023

Abstract

3D printing of MEMS devices could enable the cost-efficient production of custom-designed and complex 3D MEMS for prototyping and for low-volume applications. In this work, we present the first micro 3D-printed functional MEMS accelerometers using two-photon polymerization combined with the evaporation of metal strain gauge transducers. We measured the resonance frequency, the responsivity, and the signal stability over a period of 10 h of the 3D-printed accelerometer.

Details

Title A 3D-Printed Functional Mems Accelerometer
Author(s) Pagliano, Simone ; Marschner, David E. ; Maillard, Damien ; Ehrmann, Nils ; Stemme, Goran ; Braun, Stefan ; Villanueva, Luis Guillermo ; Niklaus, Frank
Published in 2023 Ieee 36Th International Conference On Micro Electro Mechanical Systems, Mems
Series Proceedings IEEE Micro Electro Mechanical Systems
Pages 594-597
Conference 36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Jan 15-19, 2023, Munich, GERMANY
Date 2023-01-01
Publisher New York, IEEE
ISSN 1084-6999
ISBN 978-1-6654-9308-6
Keywords
DOI https://doi.org/10.1109/MEMS49605.2023.10052385
Other identifier(s) View record in Web of Science
Laboratories NEMS
Record Appears in Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date 2023-06-05