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research article
Piezoelectric thin films for MEMS
February 27, 2023
Type
research article
Web of Science ID
WOS:000942060100003
Authors
Publication date
2023-02-27
Publisher
Published in
Volume
122
Issue
9
Article Number
090401
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
March 27, 2023
Use this identifier to reference this record