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research article

80 K cryogenic stage for ice lithography

Haque, Rubaiyet, I
•
Waafi, Affan K.
•
Jaemin, Kim  
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April 1, 2022
Micro And Nano Engineering

We present a cryogenic system design and development for ice lithography. The cryo-stage is designed with embedded channels to allow direct liquid nitrogen flow, enabling fast cryogenic cooling, and low sample temperature. The stage cools down to 78.8 K in 20 min and heats up to room temperature in 15 min, which increases throughput significantly. Compared to the previous designs, the new system reduces cooling time by 85%, and it is 50 K colder. The cryo-stage is fabricated using copper, aluminum, and polyether ether ketone (PEEK) polymer. Numerical simulations show that the thermal stress on the cryo-stage during the cooling process remains well below stage materials' mechanical yield limits. Finally, the lower stage temperature enables us to explore new precursors, materials, and applications, which we demonstrate by combining ice lithography with printed flexible electronics technology.

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Type
research article
DOI
10.1016/j.mne.2021.100101
Web of Science ID

WOS:000820702300003

Author(s)
Haque, Rubaiyet, I
Waafi, Affan K.
Jaemin, Kim  
Briand, Danick  
Han, Anpan
Date Issued

2022-04-01

Publisher

ELSEVIER

Published in
Micro And Nano Engineering
Volume

14

Article Number

100101

Subjects

Engineering, Electrical & Electronic

•

Nanoscience & Nanotechnology

•

Materials Science, Multidisciplinary

•

Optics

•

Physics, Applied

•

Engineering

•

Science & Technology - Other Topics

•

Materials Science

•

Physics

•

electron beam lithography

•

ice lithography

•

cryostage

•

2-photon polymerization

•

nanofabrication

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
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Available on Infoscience
July 18, 2022
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/189290
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