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conference paper
Photoconductive Switching Of A High-Voltage Actuator Array
January 1, 2022
2022 Ieee 35Th International Conference On Micro Electro Mechanical Systems Conference (Mems)
We present a method to control individual high-voltage actuators in an array using microfabricated photoconductive switches and a light projection system, thus overcoming the challenges of on-chip control at high voltages. Such switching capabilities go beyond actuators - our proposed approach may open the door to the simple control of other high-voltage processes, such as MEMS, pressure sensors, and RF devices.
Type
conference paper
Web of Science ID
WOS:000784358100056
Authors
Bacheva, Vesna
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Balciunaite, Aiste
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Davila, Diana
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Cauquil, Eleonore
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Gabay, Israel
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Pereiro, Iago
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Kaigala, Govind V.
Publication date
2022-01-01
Publisher
Published in
2022 Ieee 35Th International Conference On Micro Electro Mechanical Systems Conference (Mems)
ISBN of the book
978-1-6654-0911-7
Publisher place
New York
Series title/Series vol.
Proceedings IEEE Micro Electro Mechanical Systems
Start page
220
End page
222
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
Tokyo, JAPAN | Jan 09-13, 2022 | |
Available on Infoscience
May 9, 2022
Use this identifier to reference this record