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conference paper

Smart Slit Assembly Employing Continuously Tunable MEMS Shutter

Lagosh, Anton  
•
Huszka, Gergely  
•
Sattari, Hamed  
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January 1, 2021
Moems And Miniaturized Systems Xx
Conference on MOEMS and Miniaturized Systems XX

We present the concept and detailed design of a Smart Slit Assembly for next generation spectrometers, and we experimentally demonstrate operation of an individual 221 mu m x 111 mu m smart slit channel employing a MEMS actuated shutter to continuously modulate the intensity of the optical input signal. The MEMS actuated shutter is fabricated in a 211 mu m thick device layer of a Silicon-On-Insulator wafer by Deep Reactive Ion Etching. Electrostatic comb drive actuators allow an absolute displacement of 52 mu m at 74 V, resulting in a continuously tunable shutter efficiency of up to 99.97% at an operating wavelength of 532 nm.

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Type
conference paper
DOI
10.1117/12.2583149
Web of Science ID

WOS:000691782700018

Author(s)
Lagosh, Anton  
•
Huszka, Gergely  
•
Sattari, Hamed  
•
Ahlers, Berit
•
Guldimann, Benedikt
•
Kerr, Gregoire
•
Melozzi, Mauro
•
Rahnama, Peyman
•
Nishizawa, Takeshi
•
Quack, Niels  
Date Issued

2021-01-01

Publisher

SPIE-INT SOC OPTICAL ENGINEERING

Publisher place

Bellingham

Published in
Moems And Miniaturized Systems Xx
ISBN of the book

978-1-5106-4230-0

Series title/Series vol.

Proceedings of SPIE

Volume

11697

Start page

116970P

Subjects

Engineering, Electrical & Electronic

•

Nanoscience & Nanotechnology

•

Optics

•

Engineering

•

Science & Technology - Other Topics

•

smart slit assembly

•

optical mems

•

rectangular waveguide

•

multimode fiber

•

variable optical attenuator

•

switch

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
Q-LAB  
Event nameEvent placeEvent date
Conference on MOEMS and Miniaturized Systems XX

ELECTR NETWORK

Mar 06-11, 2021

Available on Infoscience
September 25, 2021
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/181679
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