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  4. Low-Voltage Silicon Photonic Mems Switch With Vertical Actuation
 
conference paper

Low-Voltage Silicon Photonic Mems Switch With Vertical Actuation

Sattari, Hamed  
•
Takabayashi, Alain Y.
•
Edinger, Pierre
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January 1, 2021
2021 34Th Ieee International Conference On Micro Electro Mechanical Systems (Mems 2021)
34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

We present a vertically movable silicon photonic MEMS switch realized in IMEC's standard silicon photonics platform followed by a dedicated postprocessing for MEMS release. The device has six optical ports, which enable four switching configurations with a safe electrical isolation of the switch's actuator. A low actuation voltage of 3.75 V is required to efficiently switch the optical signal from the drop port to the through port of the device. The device exhibits port extinctions of 16 dB and 26 dB at its OFF and ON states, respectively. With an insertion loss of < 2 dB and a broad 3 dB-bandwidth > 35 nm, this component paves the way for low-power scalable circuits in MEMS-enabled silicon photonics.

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Type
conference paper
DOI
10.1109/MEMS51782.2021.9375168
Web of Science ID

WOS:000667731600072

Author(s)
Sattari, Hamed  
Takabayashi, Alain Y.
Edinger, Pierre
Verheyen, Peter
Gylfason, Kristinn B.
Bogaerts, Wim
Quack, Niels  
Date Issued

2021-01-01

Publisher

IEEE

Publisher place

New York

Published in
2021 34Th Ieee International Conference On Micro Electro Mechanical Systems (Mems 2021)
ISBN of the book

978-1-6654-1912-3

Series title/Series vol.

Proceedings IEEE Micro Electro Mechanical Systems

Start page

298

End page

301

Subjects

Engineering, Electrical & Electronic

•

Engineering, Mechanical

•

Nanoscience & Nanotechnology

•

Engineering

•

Science & Technology - Other Topics

•

silicon photonic mems

•

optical switch

•

directional coupler

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
GR-QUA  
Event nameEvent placeEvent date
34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ELECTR NETWORK

Jan 25-29, 2021

Available on Infoscience
July 31, 2021
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/180326
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