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research article
p-NiO junction termination extensions for GaN power devices
July 1, 2021
We report the demonstration of p-NiO layers as junction termination extensions (JTEs) for realizing high-performance GaN power devices. The p-NiO was deposited by RF sputtering, a flexible process which enables to achieve high hole densities. In this work, we investigated the material and transport properties of p-NiO on GaN, and demonstrated its application as JTEs for GaN-on-Si Schottky barrier diodes (SBDs). p-NiO JTEs resulted in a similar ON-state behavior compared to a control SBD without any termination, while providing 1.9x-higher breakdown voltage of 443 V, the highest reported for SBDs on GaN-on-Si substrates.
Type
research article
Web of Science ID
WOS:000669659600001
Authors
Publication date
2021-07-01
Publisher
Published in
Volume
14
Issue
7
Article Number
071006
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
July 17, 2021
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