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research article

p-NiO junction termination extensions for GaN power devices

Khadar, Riyaz Abdul
•
Floriduz, Alessandro  
•
Wang, Taifang  
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July 1, 2021
Applied Physics Express

We report the demonstration of p-NiO layers as junction termination extensions (JTEs) for realizing high-performance GaN power devices. The p-NiO was deposited by RF sputtering, a flexible process which enables to achieve high hole densities. In this work, we investigated the material and transport properties of p-NiO on GaN, and demonstrated its application as JTEs for GaN-on-Si Schottky barrier diodes (SBDs). p-NiO JTEs resulted in a similar ON-state behavior compared to a control SBD without any termination, while providing 1.9x-higher breakdown voltage of 443 V, the highest reported for SBDs on GaN-on-Si substrates.

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Type
research article
DOI
10.35848/1882-0786/ac09ff
Web of Science ID

WOS:000669659600001

Author(s)
Khadar, Riyaz Abdul
•
Floriduz, Alessandro  
•
Wang, Taifang  
•
Matioli, Elison  
Date Issued

2021-07-01

Publisher

IOP PUBLISHING LTD

Published in
Applied Physics Express
Volume

14

Issue

7

Article Number

071006

Subjects

Physics, Applied

•

Physics

•

gan

•

p-nio

•

sbd

•

vertical diode

•

high breakdown voltage

•

heterojunction

•

jte

•

electrical-transport

•

n-diodes

•

schottky

•

voltage

•

conduction

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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POWERLAB  
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July 17, 2021
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/179939
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