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research article

Quasi-vertical GaN-on-Si reverse blocking power MOSFETs

Abdul Khadar, Riyaz
•
Floriduz, Alessandro  
•
Liu, Chao  
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April 1, 2021
Applied Physics Express

We demonstrate quasi-vertical reverse blocking (RB) MOSFETs on 6.7 mu m thick GaN grown on a 6 inch Si substrate by metalorganic chemical vapor deposition. The RB capability was achieved by replacing the ohmic drain with a quasi-vertical Schottky drain, resulting in a RB voltage of similar to 300 V while preserving the ON-resistance (R-on,R-sp). Schottky contacts on etched i-GaN surface were realized through an optimized fabrication process based on tetramethylammonium hydroxide treatments. The fabricated RB-MOSFET had a low R-on,R-sp of 4.75 m omega cm(2), current density of similar to 0.9 kA cm(-2) and a forward blocking voltage of 570 V.

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Type
research article
DOI
10.35848/1882-0786/abf054
Web of Science ID

WOS:000637834400001

Author(s)
Abdul Khadar, Riyaz
Floriduz, Alessandro  
Liu, Chao  
Soleimanzadeh, Reza  
Matioli, Elison  
Date Issued

2021-04-01

Publisher

IOP PUBLISHING LTD

Published in
Applied Physics Express
Volume

14

Issue

4

Article Number

046503

Subjects

Physics, Applied

•

Physics

•

mosfet

•

gan

•

gan-on-si

•

reverse-blocking

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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May 8, 2021
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/177864
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