Large area fabrication of patterns of resonant waveguide gratings by electron beam lithography for up-scalable applications
2018
Details
Title
Large area fabrication of patterns of resonant waveguide gratings by electron beam lithography for up-scalable applications
Author(s)
Quaranta, Giorgio ; Guillaume, B. ; Benes, Zdenek ; Martin, Olivier J.F. ; Gallinet, Benjamin
Published in
Proceedings of the Progress in Electromagnetics Research Symposium (PIERS 2018)
Conference
Progress in Electromagnetics Research Symposium (PIERS 2018), Toyama, Japan, August 1-4, 2018
Date
2018-08-01
ISBN
978-4-885523-15-1
Keywords
Laboratories
NAM
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NAM - Nanophotonics and Metrology Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Record creation date
2021-05-03