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conference paper
Large area fabrication of patterns of resonant waveguide gratings by electron beam lithography for up-scalable applications
August 1, 2018
Proceedings of the Progress in Electromagnetics Research Symposium (PIERS 2018)
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Type
conference paper
Authors
Publication date
2018-08-01
Published in
Proceedings of the Progress in Electromagnetics Research Symposium (PIERS 2018)
ISBN of the book
978-4-885523-15-1
Subjects
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
Toyama, Japan | August 1-4, 2018 | |
Available on Infoscience
May 3, 2021