ABH damping of monolithic silica glass cantilever by structural and material modification using fs laser micromachining

research article

Tomita, Kana

•

Kishi, Tetsuo

•

Yano, Tetsuji

September 27, 2020

Name

Tomita et al. - 2020 - ABH damping of monolithic silica glass cantilever .pdf

Type

Publisher's Version

Version

Published version

Access type

restricted

License Condition

Copyright

Size

1.23 MB

Format

Adobe PDF

Checksum (MD5)

917150c3a89181321af12f12febc419c