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  4. Resonant Pzt Mems Mirror With Segmented Electrodes
 
conference paper

Resonant Pzt Mems Mirror With Segmented Electrodes

Piot, Adrien
•
Pribosek, Jaka
•
Maufay, Jordan
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January 1, 2020
2020 33Rd Ieee International Conference On Micro Electro Mechanical Systems (Mems 2020)
33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

We report a transduction optimization method of piezo-based MEMS structures using segmentation of the excitation electrodes. Optimal transduction is achieved by matching the electric field distribution to the polarization distribution including the direct piezoelectric action caused by mechanical motion of the desired mode. Next, topological optimization of electrodes using custom Matlab scripts is applied to segment the electrodes. Method was applied to improve the design of the existing state-of-the art resonant piezoelectric MEMS mirrors. The optimized mirrors were fabricated and feature an 80 % increase in the optical scan angle (theta(opt)), lower dynamic deformation as well as 26 % reduction in power consumption compared to original design.

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Type
conference paper
DOI
10.1109/MEMS46641.2020.9056124
Web of Science ID

WOS:000569381600135

Author(s)
Piot, Adrien
Pribosek, Jaka
Maufay, Jordan
Schicker, Johannes
Tortschanoff, Andreas
Matloub, Ramin  
Muralt, Paul  
Moridi, Mohssen
Date Issued

2020-01-01

Publisher

IEEE

Publisher place

New York

Published in
2020 33Rd Ieee International Conference On Micro Electro Mechanical Systems (Mems 2020)
ISBN of the book

978-1-7281-3581-6

Series title/Series vol.

Proceedings IEEE Micro Electro Mechanical Systems

Start page

517

End page

520

Subjects

Engineering, Electrical & Electronic

•

Engineering, Mechanical

•

Nanoscience & Nanotechnology

•

Engineering

•

Science & Technology - Other Topics

•

pzt

•

micromirror

•

1d

•

piezoelectric

•

transduction

•

segmentation

•

electrodes

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CIME  
LC  
Event nameEvent placeEvent date
33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Vancouver, CANADA

Jan 18-22, 2020

Available on Infoscience
October 3, 2020
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/172186
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