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research article

Diffractive optical elements in single crystal diamond

Wildi, Thibault
•
Kiss, Marcell  
•
Quack, Niels  
July 1, 2020
Optics Letters

We demonstrate the design, fabrication, and experimental characterization of near-field binary phase transmission diffractive optical elements (DOEs) in single crystal diamond. Top-hat and arbitrary pattern DOE beam shapers were numerically optimized using an iterative Fourier transform algorithm (IFTA). Commercially available single crystal diamond plates (3 mm x 3 mm x 0.3 mm) were patterned using hardmask deposition (alpha-Si), e-beam lithography, and O-2 plasma-based diamond reactive ion etching. The resulting binary phase relief patterns were characterized using scanning electron microscopy (SEM) and atomic force microscopy (AFM). Experimental characterization of the single crystal diamond DOES in transmission at lambda = 532 nm confirms excellent uniformity of the resulting top-hat beam profile as required in copper welding applications. (C) 2020 Optical Society of America

  • Details
  • Metrics
Type
research article
DOI
10.1364/OL.393679
Web of Science ID

WOS:000546808900028

Author(s)
Wildi, Thibault
Kiss, Marcell  
Quack, Niels  
Date Issued

2020-07-01

Publisher

OPTICAL SOC AMER

Published in
Optics Letters
Volume

45

Issue

13

Start page

3458

End page

3461

Subjects

Optics

•

fabrication

•

approximation

•

generation

•

algorithm

•

gratings

•

damage

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
GR-QUA  
Available on Infoscience
July 23, 2020
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/170284
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