Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Tolerancing the surface form of aspheric microlenses manufactured by wafer-level optics techniques
 
research article

Tolerancing the surface form of aspheric microlenses manufactured by wafer-level optics techniques

Beguelin, Jeremy
•
Noell, Wilfried
•
Scharf, Toralf  
Show more
May 1, 2020
Applied Optics

Tolerancing is an important step toward the fabrication of high-quality and cost-effective lens surfaces. It is critical for wafer-level optics, when up to tens of thousands microlenses are fabricated in parallel and whose surfaces cannot be formed individually. However, approaches developed for macro-optics cannot be directly transposed for microlenses because of differences in fabrication and testing techniques. In particular, microlens surfaces are usually limited to conical surfaces. Here, we study the connection between the microlens optical performance and the form of its surface, suggesting surface form representations suited for tolerancing purposes. Then, we compare them with common representations for tolerancing real optical systems. Measured surface forms of microlenses are also provided to make the tolerancing procedure realistic. In addition, we propose term definitions for microoptics, complements to typical terms for macro-optics, to ease the communication between optical designers and manufacturers. Based on the results presented in this paper, guidelines are proposed for tolerancing microlenses. We suggest applying them as a first step toward a more effective and comprehensive tolerancing procedure. (C) 2020 Optical Society of America

  • Details
  • Metrics
Type
research article
DOI
10.1364/AO.388453
Web of Science ID

WOS:000537846600047

Author(s)
Beguelin, Jeremy
Noell, Wilfried
Scharf, Toralf  
Voelkel, Reinhard
Date Issued

2020-05-01

Publisher

OPTICAL SOC AMER

Published in
Applied Optics
Volume

59

Issue

13

Start page

3910

End page

3919

Subjects

Optics

•

fabrication

•

arrays

•

projectors

•

design

•

laser

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NAM  
Available on Infoscience
June 20, 2020
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/169486
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés