Silicon Photonic Broadband Suspended Directional Coupler

We demonstrate a broadband Silicon Photonic directional coupler that is entirely suspended in air. The device has been fabricated in a simplified Silicon Photonics process based on the standard IMEC ISIPP5OG platform, combined with custom post-processing including an HF vapor release step. The coupler exhibits a 1 dB bandwidth of 35 nm at lambda=1550 nm, and an insertion loss of 0.5 dB at 1560 nm, confirmed experimentally. With an extinction ratio of 25 dB at 1550 nm and a compact footprint of similar to 30 x 20 mu m(2), the coupler can serve as basis for a new generation of compact standard Silicon Photonic MEMS library components.


Published in:
2019 International Conference On Optical Mems And Nanophotonics (Omn), 214-215
Presented at:
International Conference on Optical MEMS and Nanophotonics (OMN), Daejeon, SOUTH KOREA, Jul 28-Aug 01, 2019
Year:
Jan 01 2019
Publisher:
New York, IEEE
ISSN:
2160-5033
ISBN:
978-1-7281-4503-7
Keywords:
Laboratories:




 Record created 2020-04-12, last modified 2020-04-20


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