MEMS-Enabled Silicon Photonic Integrated Devices and Circuits

Photonic integrated circuits have seen a dramatic increase in complexity over the past decades. This development has been spurred by recent applications in datacenter communications and enabled by the availability of standardized mature technology platforms. Mechanical movement of wave-guiding structures at the micro- and nanoscale provides unique opportunities to further enhance functionality and to reduce power consumption in photonic integrated circuits. We here demonstrate integration of MEMS-enabled components in a simplified silicon photonics process based on IMEC's Standard iSiPP50G Silicon Photonics Platform and a custom release process.


Published in:
Ieee Journal Of Quantum Electronics, 56, 1, 8400210
Year:
Feb 01 2020
Publisher:
Piscataway, IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
ISSN:
0018-9197
1558-1713
Keywords:
Laboratories:




 Record created 2020-03-03, last modified 2020-04-20


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