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  4. Sweat Biomarker Sensor Incorporating Picowatt, Three-Dimensional Extended Metal Gate Ion Sensitive Field Effect Transistors
 
research article

Sweat Biomarker Sensor Incorporating Picowatt, Three-Dimensional Extended Metal Gate Ion Sensitive Field Effect Transistors

Zhang, Junrui  
•
Rupakula, Maneesha  
•
Bellando, Francesco  
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July 8, 2019
ACS Sensors

Ion sensitive field effect transistors (ISFETs) form a very attractive solution for wearable sensors due to their capacity for ultra-miniaturization, low power operation, and very high sensitivity, supported by complementary metal oxide semiconductor (CMOS) integration. This paper reports for the first time, a multianalyte sensing platform that incorporates high performance, high yield, high robustness, three-dimensional-extended-metal-gate ISFETs (3D-EMG-ISFETs) realized by the postprocessing of a conventional 0.18 μm CMOS technology node. The detection of four analytes (pH, Na+, K+, and Ca2+) is reported with excellent sensitivities (58 mV/pH, −57 mV/dec(Na+), −48 mV/dec(K+), and −26 mV/dec(Ca2+)) close to the Nernstian limit, and high selectivity, achieved by the use of highly selective ion selective membranes based on postprocessing integration steps aimed at eliminating any significant sensor hysteresis and parasitics. We are reporting simultaneous time-dependent recording of multiple analytes, with high selectivities. In vitro real sweat tests are carried out to prove the validity of our sensors. The reported sensors have the lowest reported power consumption, being capable of operation down to 2 pW/sensor. Due to the ultralow power consumption of our ISFETs, we achieve and report a final four-analyte passive system demonstrator including the readout interface and the remote powering of the ISFET sensors, all powered by an radio frequency (RF) signal.

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Type
research article
DOI
10.1021/acssensors.9b00597
Web of Science ID

WOS:000483440000011

Author(s)
Zhang, Junrui  
Rupakula, Maneesha  
Bellando, Francesco  
Garcia Cordero, Erick Antonio  
Wildhaber, Fabien  
Herment, Guillaume  
Guérin, Hoël Maxime  
Ionescu, Mihai Adrian  
Date Issued

2019-07-08

Published in
ACS Sensors
Volume

4

Issue

8

Start page

2039

End page

2047

Subjects

ISFET ultralow power functionalized sensing wearable sweat sensor real time sweat monitoring energy harvesting

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Available on Infoscience
January 24, 2020
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/164902
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