Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production
The present invention relates to a free-standing single crystalline diamond part and a single crystalline diamond part production method. The method includes the steps of: - providing a single crystalline diamond substrate or layer; - providing a first adhesion layer on the substrate or layer; - providing a second adhesion layer on the first adhesion layer: - providing a mask layer on the second adhesion layer; - forming at least one indentation or a plurality of indentations through the mask layer and the first and second adhesion layers to expose a portion or portions of the single crystalline diamond substrate or layer; and - etching the exposed portion or portions of the single crystalline diamond substrate or layer and etching entirely through the single crystalline diamond substrate or layer.
60081103
Alternative title(s) : (fr) Procédé de production de pièce en diamant monocristallin pour la production d'un composant mécanique et optique monocristallin autonome
TTO:6.1638
Patent number | Country code | Kind code | Date issued |
US11512409 | US | B2 | 2022-11-29 |
JP7130272 | JP | B2 | 2022-09-05 |
JP2021500287 | JP | A | 2021-01-07 |
CN111417747 | CN | A | 2020-07-14 |
EP3676426 | EP | A1 | 2020-07-08 |
US2020199780 | US | A1 | 2020-06-25 |
WO2019043432 | WO | A1 | 2019-03-07 |