Single crystalline diamond diffractive optical elements and method of fabricating the same
The present invention concerns a single crystalline diamond optical element production method. The method includes the steps of: ‐ providing a single crystalline diamond substrate or layer; ‐ applying a mask layer to the single crystalline diamond substrate or layer; ‐ forming at least one or a plurality of indentations or recesses through the mask layer to expose a portion or portions of the single crystalline diamond substrate or layer; and ‐ etching the exposed portion or portions of the single crystalline diamond substrate or layer.
63713927
Alternative title(s) : (fr) Éléments optiques à diffraction en diamant monocristallin et leur procédé de fabrication
TTO:6.1638
Patent number | Country code | Kind code | Date issued |
US2020355857 | US | A1 | 2020-11-12 |
JP2020531921 | JP | A | 2020-11-05 |
EP3676427 | EP | A1 | 2020-07-08 |
CN111279023 | CN | A | 2020-06-12 |
WO2019043570 | WO | A1 | 2019-03-07 |