Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters
2019
Abstract
In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis. The resonance frequency of around 4.8GHz and 13.6GHz are suitable for development of RF filters. The XBARs 3rd, 5th and even 9th harmonics were observed up to 38 GHz.
Details
Title
Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters
Author(s)
Plessky, Victor ; Yandrapalli, Soumya ; Turner, Patrick J. ; Villanueva, Luis G. ; Koskela, Julius ; Faizan, Muhammad ; De Pastina, Annalisa ; Garcia, Bryant ; Costa, Jim ; Hammond, Robert B.
Published in
2019 Ieee Mtt-S International Microwave Symposium (Ims)
Series
IEEE MTT-S International Microwave Symposium
Pages
512-515
Conference
IEEE-MTT-S International Microwave Symposium (IMS), Jun 02-07, 2019, Boston, MA
Date
2019-01-01
Publisher
New York, IEEE
ISSN
0149-645X
2576-7216
2576-7216
ISBN
978-1-7281-1309-8
Keywords
Other identifier(s)
View record in Web of Science
Laboratories
NEMS
Record Appears in
Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2019-11-29