Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters
In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis. The resonance frequency of around 4.8GHz and 13.6GHz are suitable for development of RF filters. The XBARs 3rd, 5th and even 9th harmonics were observed up to 38 GHz.
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Plessky, V., Yandrapalli, S., Turner, P. J., Villanueva, L. G., Koskela, J., Faizan, M., De Pastina, A., Garcia, B., Costa, J., & Hammond, R. B. (2019). Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters. 2019 Ieee Mtt-S International Microwave Symposium (Ims), IEEE MTT-S International Microwave Symposium, 512–515. https://doi.org/10.1109/MWSYM.2019.8700876
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WOS:000494461700132
2019-01-01
New York
978-1-7281-1309-8
IEEE MTT-S International Microwave Symposium
512
515
REVIEWED
EPFL
| Event name | Event place | Event date |
Boston, MA | Jun 02-07, 2019 | |