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  4. Wafer-scale MOCVD growth of monolayer MoS2 on sapphire and SiO2
 
research article

Wafer-scale MOCVD growth of monolayer MoS2 on sapphire and SiO2

Cun, Huanyao  
•
Macha, Michal  
•
Kim, HoKwon  
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October 1, 2019
Nano Research

High-quality and large-scale growth of monolayer molybdenum disulfide (MoS2) has caught intensive attention because of its potential in many applications due to unique electronic properties. Here, we report the wafer-scale growth of high-quality monolayer MoS2 on singlecrystalline sapphire and also on SiO2 substrates by a facile metal-organic chemical vapor deposition (MOCVD) method. Prior to growth, an aqueous solution of sodium molybdate (Na2MoO4) is spun onto the substrates as the molybdenum precursor and diethyl sulfide ((C2H5)(2)S) is used as the sulfur precursor during the growth. The grown MoS2 films exhibit crystallinity, good electrical performance (electron mobility of 22 cm(2)center dot V-1 center dot s(-1)) and structural continuity maintained over the entire wafer. The sapphire substrates are reusable for subsequent growth. The same method is applied for the synthesis of tungsten disulfide (WS2). Our work provides a facile, reproducible and cost-efficient method for the scalable fabrication of high-quality monolayer MoS2 for versatile applications, such as electronic and optoelectronic devices as well as the membranes for desalination and power generation.

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Type
research article
DOI
10.1007/s12274-019-2502-9
Web of Science ID

WOS:000489896700030

Author(s)
Cun, Huanyao  
Macha, Michal  
Kim, HoKwon  
Liu, Ke  
Zhao, Yanfei  
LaGrange, Thomas  
Kis, Andras  
Radenovic, Aleksandra  
Date Issued

2019-10-01

Published in
Nano Research
Volume

12

Issue

10

Start page

2646

End page

2652

Subjects

Chemistry, Physical

•

Nanoscience & Nanotechnology

•

Materials Science, Multidisciplinary

•

Physics, Applied

•

Chemistry

•

Science & Technology - Other Topics

•

Materials Science

•

Physics

•

molybdenum disulfide

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two-dimensional (2d) materials

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metal-organic chemical vapor deposition (mocvd)

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wafer-scale fabrication

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chemical-vapor-deposition

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large-area

•

phase-contrast

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thin-layers

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metal

•

hydrogen

•

xps

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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Available on Infoscience
October 26, 2019
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/162354
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