High-quality single crystal diamond diffraction gratings fabricated by crystallographic etching
We demonstrate a novel method for fabricating single crystal diamond diffraction gratings based on crystallographic etching that yields high-quality diffraction gratings from commercially available <100> diamond plates. Both V-groove and rectangular gratings were fabricated and characterised using scanning electron microscopy and atomic force microscopy, revealing angles of 57° and 87° depending on the crystal orientation, with mean roughness below Ra = 5 nm on the sidewalls. The gratings were also optically characterised, showing good agreement with simulated results. The fabrication method demonstrated in this contribution shows the way for manufacturing high-quality diamond diffractive components that surpass existing devices both in quality and manufacturability.
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High-quality single crystal diamond diffraction gratings fabricated by crystallographic etch-ing.pdf
Publisher's Version
http://purl.org/coar/version/c_970fb48d4fbd8a85
openaccess
3.33 MB
Adobe PDF
9380f90abba757335864b4c59a8419ec