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research article

High-quality single crystal diamond diffraction gratings fabricated by crystallographic etching

Kiss, Marcell  
•
Graziosi, Teodoro  
•
Toros, Adrien  
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October 7, 2019
Optics Express

We demonstrate a novel method for fabricating single crystal diamond diffraction gratings based on crystallographic etching that yields high-quality diffraction gratings from commercially available <100> diamond plates. Both V-groove and rectangular gratings were fabricated and characterised using scanning electron microscopy and atomic force microscopy, revealing angles of 57° and 87° depending on the crystal orientation, with mean roughness below Ra = 5 nm on the sidewalls. The gratings were also optically characterised, showing good agreement with simulated results. The fabrication method demonstrated in this contribution shows the way for manufacturing high-quality diamond diffractive components that surpass existing devices both in quality and manufacturability.

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http://purl.org/coar/version/c_970fb48d4fbd8a85

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High-quality single crystal diamond diffraction gratings fabricated by crystallographic etch-ing.pdf

Type

Publisher's Version

Version

http://purl.org/coar/version/c_970fb48d4fbd8a85

Access type

openaccess

Size

3.33 MB

Format

Adobe PDF

Checksum (MD5)

9380f90abba757335864b4c59a8419ec

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