Phase masks for electron microscopy fabricated by thermal scanning probe lithography
2019
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Details
Title
Phase masks for electron microscopy fabricated by thermal scanning probe lithography
Author(s)
Hettler, Simon ; Radtke, Lucas ; Grünewald, Lukas ; Lisunova, Yuliya ; Peric, Oliver ; Brugger, Juergen ; Bonanni, Simon
Published in
Micron
Volume
127
Pages
102753
Date
2019-10-03
Other identifier(s)
DOI: https://doi.org/10.1016/j.micron.2019.102753
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2019-10-10