MEMS tunable capacitors with fragmented electrodes and rotational electro-thermal drive


Published in:
Microsystem Technologies, 13, 1589-1594
Year:
2007
Publisher:
Springer, Springer-Verlag
ISSN:
0946-7076
1432-1858
Note:
National Licences
Additional link:
Laboratories:


Note: The status of this file is: Anyone


 Record created 2019-08-23, last modified 2020-10-25

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