Modular interface and experimental setup for in-vacuum operation of microfluidic devices

We report on the design and operation of a world-to-chip microfluidic interface and experimental setup for fluidic micro- and nano-electromechanical systems. The central component of the interface is an engineered polyether ether ketone connector that brings fluid samples from a commercial syringe pump to the chip with the help of o-rings. In addition to that, the connector serves as an on-chip vacuum chamber. To confirm the adequate operation of our interface, we use complex microfluidic devices that were previously fabricated, suspended microchannel resonators, and demonstrate a fast exchange between fluids (on the scale of 130 s from isopropyl alcohol to water), in-vacuum operation of the devices (intrinsic damping regime), and accurate temperature control of the chip at different set points.


Published in:
Review of Scientific Instruments, 90, 4, 045006
Year:
Apr 01 2019
Publisher:
Melville, AMER INST PHYSICS
Keywords:
Laboratories:




 Record created 2019-07-08, last modified 2020-04-20


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