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  4. Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits
 
conference paper

Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits

Quack, Niels  
•
Sattari, Hamed  
•
Takabayashi, Alain Y.  
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January 1, 2019
2019 Optical Fiber Communications Conference And Exhibition (Ofc)
Optical Fiber Communications Conference and Exhibition (OFC)

With the maturing and the increasing complexity of Silicon Photonics technology, novel avenues are pursued to reduce power consumption and to provide enhanced functionality: exploiting mechanical movement in advanced Silicon Photonic Integrated Circuits provides a promising path to access a strong modulation of the effective index and to low power consumption by employing mechanically stable and thus non-volatile states. In this paper, we will discuss recent achievements in the development of MEMS enabled systems in Silicon Photonics and outline the roadmap towards reconfigurable general Photonic Integrated Circuits.

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Type
conference paper
DOI
10.1364/OFC.2019.M2D.3
Web of Science ID

WOS:000469837300318

Author(s)
Quack, Niels  
Sattari, Hamed  
Takabayashi, Alain Y.  
Zhang, Yu
Edinger, Pierre
Errando-Herranz, Carlos
Gylfason, Kristinn B.
Wang, Xiaojing
Niklaus, Frank
Jezzini, Moises A.
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Date Issued

2019-01-01

Publisher

IEEE

Publisher place

New York

Published in
2019 Optical Fiber Communications Conference And Exhibition (Ofc)
ISBN of the book

978-1-9435-8053-8

Subjects

Engineering, Electrical & Electronic

•

Optics

•

Telecommunications

•

Engineering

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
GR-QUA  
NAM  
Event nameEvent placeEvent date
Optical Fiber Communications Conference and Exhibition (OFC)

San Diego, CA

Mar 03-07, 2019

Available on Infoscience
June 24, 2019
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/158456
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