Advanced Sensor Systems by Low-Temperature Heterogeneous 3D Integration Processes
Fernandez-Bolanos, Montserrat; Muller, Andrei; Weber, Josef; Ramm, Peter
2018

Abstract

A few application demonstrators of heterogeneous 3D integrated systems including innovative nanosensors for gas detection and biofludic applications have been successfully implemented showing efficient low-temperature heterogeneous integration processes, miniaturization, low power consumption, extremely low detection limits (5 ppm) and novel functionalities very interesting for smart sensors in automotive and healthcare applications.

Details

Title Advanced Sensor Systems by Low-Temperature Heterogeneous 3D Integration Processes
Author(s) Fernandez-Bolanos, Montserrat ; Muller, Andrei ; Weber, Josef ; Ramm, Peter
Published in 2018 Symposium On Design, Test, Integration & Packaging Of Mems And Moems (Dtip)
Conference 20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS (DTIP), Roma, ITALY, May 22-25, 2018
Date 2018-01-01
Publisher New York, IEEE
ISBN 978-1-5386-6199-4
Keywords
DOI https://doi.org/10.1109/DTIP.2018.8394203
Other identifier(s) View record in Web of Science
Laboratories NANOLAB
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date 2019-06-18

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