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  4. All CMOS Integrated 3D-Extended Metal Gate ISFETs for pH and Multi-Ion (Na+, K+, Ca2+) sensing
 
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conference paper

All CMOS Integrated 3D-Extended Metal Gate ISFETs for pH and Multi-Ion (Na+, K+, Ca2+) sensing

Zhang, J. -R.
•
Rupakula, M.  
•
Bellando, F.  
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January 1, 2018
2018 Ieee International Electron Devices Meeting (Iedm)
64th IEEE Annual International Electron Devices Meeting (IEDM)

This paper reports for the first time, smart 3D-Extended-Metal-Gate Ion-Sensitive-Field-Effect-Transistors (3D-EMG-ISFETs), with unique figures of merit: (i) extremely-low-power (down to a record value of 2 pW per sensor under excellent linearity), (ii) all CMOS integrated, (iii) high performance pH and multi-ion (Na+, K+, Ca2+) sensing, and, (iv) uniquely low cross sensitivity experimentally proven. Detailed electrical DC and dynamic characterizations show excellent sensitivities (56.8 mV/pH, -58mV/dec for Na+, -49.5 mV/dec for K+, and -21.9 mV/dec for Ca2+) and high selectivity of each ion sensor against 4 different ions that usually coexist in biofluids, all achieved on same CMOS die. Furthermore, unprecedented results show that the threshold voltage (V-th) variability of such CMOS ISFET is reduced by 78 times. We report a V-th drift rate in liquid conditions of 0.67 mV/h, decreased by one order of magnitude compared to other state of the art CMOS ISFETs. Overall, the reported experimental achievements, supported by SPICE calibrated behavioral model simulations results shown in this paper, are expected to greatly enhance the predictability of high performance multi-analyte ISFETs, which is a big step towards ISFET sensor system mass production.

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Type
conference paper
DOI
10.1109/IEDM.2018.8614668
Web of Science ID

WOS:000459882300187

Author(s)
Zhang, J. -R.
•
Rupakula, M.  
•
Bellando, F.  
•
Cordero, E. Garcia
•
Longo, J.
•
Wildhaber, F.  
•
Herment, G.
•
Guerin, H.  
•
Ionescu, A. M.  
Date Issued

2018-01-01

Publisher

IEEE

Publisher place

New York

Published in
2018 Ieee International Electron Devices Meeting (Iedm)
ISBN of the book

978-1-7281-1987-8

Series title/Series vol.

IEEE International Electron Devices Meeting

Start page

12.1.1

End page

12.1.4

Subjects

Engineering, Electrical & Electronic

•

Engineering

•

field-effect transistors

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Event nameEvent placeEvent date
64th IEEE Annual International Electron Devices Meeting (IEDM)

San Francisco, CA

Dec 01-05, 2018

Available on Infoscience
June 18, 2019
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/157011
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