Single crystal diamond micro-disk resonators by focused ion beam milling

We report on single crystal diamond micro-disk resonators fabricated in bulk chemical vapor deposition diamond plates (3 mm x 3 mm x 0.15 mm) using a combination of deep reactive ion etching and Focused Ion Beam (FIB) milling. The resulting structures are micro-disks of few mu m in diameter and less than 1 mu m thick, supported by a square or diamond section pillar resulting from the multi-directional milling. Thin aluminum and chromium layers are used to ground the substrate, limit the ion implantation, and prevent edge rounding and roughening. FIB damage is then removed by a combination of hydrofluoric acid etching, oxygen plasma cleaning, and annealing at 500 degrees C for 4 h in air. We experimentally characterize the optical behavior of the devices by probing the transmission of a tapered fiber evanescently coupled to the micro-disk, revealing multiple resonances with a quality factor up to 5700 in the S- and C-band. (c) 2018 Author(s).


Published in:
Apl Photonics, 3, 12, 126101
Year:
Dec 01 2018
Publisher:
Melville, AMER INST PHYSICS
ISSN:
2378-0967
Keywords:
Laboratories:




 Record created 2019-01-23, last modified 2019-06-19


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