Enhancement of optical quality factor by thermal annealing of single crystal diamond micro-resonators

We report on the increase in optical quality factor of a suspended single crystal diamond micro-disk resonator by thermal annealing. The resonators are fabricated by Deep Reactive Ion Etching (DRIE) to obtain circular pillars in bulk single crystal diamond, followed by multidirectional Focused Ion Beam (FIB) milling to shape the anchor, thin the micro disk and smooth the sidewalls. Thermal annealing in air at 500 degrees C for 4 h eliminates FIB induced crystal damage yielding optical quality factors of up to 5'700, corresponding to an increase of up to 5x compared to the resonators before annealing.


Published in:
2018 International Conference On Optical Mems And Nanophotonics (Omn), 20-21
Presented at:
International Conference on Optical MEMS and Nanophotonics (OMN), Lausanne, SWITZERLAND, Jul 29-Aug 02, 2018
Year:
Jan 01 2018
Publisher:
New York, IEEE
ISSN:
2160-5033
ISBN:
978-1-5090-6374-1
Keywords:
Laboratories:




 Record created 2019-01-23, last modified 2019-08-12


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