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  4. Through-Glass Vias for Glass Interposers and MEMS Packaging Applications Fabricated Using Magnetic Assembly of Microscale Metal Wires
 
research article

Through-Glass Vias for Glass Interposers and MEMS Packaging Applications Fabricated Using Magnetic Assembly of Microscale Metal Wires

Laakso, Miku J.
•
Bleiker, Simon J.
•
Liljeholm, Jessica
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January 1, 2018
Ieee Access

A through-glass via (TGV) provides a vertical electrical connection through a glass substrate. TGVs are used in advanced packaging solutions, such as glass interposers and wafer-level packaging of microelectromechanical systems (MEMS). However, TGVs are challenging to realize because via holes in glass typically do not have a sufficiently high-quality sidewall profile for super-conformal electroplating of metal into the via holes. To overcome this problem, we demonstrate here that the via holes can instead be filled by magnetically assembling metal wires into them. This method was used to produce TGVs with a typical resistance of 64 m Omega, which is comparable with other metal TGV types reported in the literature. In contrast to many TGV designs with a hollow center, the proposed TGVs can be more area efficient by allowing solder bump placement directly on top of the TGVs, which was demonstrated here using solder-paste jetting. The magnetic assembly process can be parallelized using an assembly robot, which was found to provide an opportunity for increased wafer-scale assembly speed. The aforementioned qualities of the magnetically assembled TGVs allow the realization of glass interposers and MEMS packages in different thicknesses without the drawbacks associated with the current TGV fabrication methods.

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Type
research article
DOI
10.1109/ACCESS.2018.2861886
Web of Science ID

WOS:000444505800001

Author(s)
Laakso, Miku J.
Bleiker, Simon J.
Liljeholm, Jessica
Martensson, Gustaf E.
Asiatici, Mikhail  
Fischer, Andreas C.
Stemme, Goran
Ebefors, Thorbjorn
Niklaus, Frank
Date Issued

2018-01-01

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

Published in
Ieee Access
Volume

6

Start page

44306

End page

44317

Subjects

Computer Science, Information Systems

•

Engineering, Electrical & Electronic

•

Telecommunications

•

Computer Science

•

Engineering

•

Telecommunications

•

chip scale packaging

•

femtosecond laser

•

glass interposer

•

laser ablation

•

multichip modules

•

robotic assembly

•

self-assembly

•

spin-on glass

•

thermal expansion

•

through-glass via

•

through-silicon vias

•

tsv

•

thermal-expansion

•

silicon vias

•

reflow process

•

density

•

coefficient

•

copper

•

nickel

•

gold

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LAP  
Available on Infoscience
December 13, 2018
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/152518
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