Monolithic Fabrication of Silicon Nanowires Bridging Thick Silicon Structures

A monolithic process is developed for the fabrication of Si nanowires within thick Si substrates. A combination of anisotropic etch and sidewall passivation is utilized to protect and release Si lines during the subsequent deep etch. An etch depth of 10 mu m is demonstrated with a future prospect for 50 mu m opening up new possibilities for the deterministic integration of nanowires with microsystems. Nanowires with in-plane dimensions as low as 20 nm and aspect ratios up to 150 are obtained. Nanomechanical characterization through bending tests further confirms structural integrity of the connection between nanowires and anchoring Si microstructures.


Published in:
Ieee Transactions On Nanotechnology, 17, 6, 1299-1302
Year:
Nov 01 2018
Publisher:
Piscataway, IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
ISSN:
1536-125X
1941-0085
Keywords:
Laboratories:




 Record created 2018-12-13, last modified 2019-06-19


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