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research article

Theoretical study of an electrostatically actuated torsional microsensor for biological applications

Bouchaala, Adam M. S.
February 1, 2018
Microsystem Technologies-Micro-And Nanosystems-Information Storage And Processing Systems

We develop an analytical formulation to calculate the induced resonance frequency shifts of an electrostatically actuated torsional microsensor due to an added bio-mass (E. coli). Based on a lumped-parameter model, we investigate the static and the linear eigenvalue problem of the torsional microsensor. The added mass is modeled as a point mass load placed on different locations along the x-axis of the microsensor. A closed-form expression is determined to calculate the frequency shift under a DC voltage as a function of the added mass. Finite Element Analysis (FEA) results show good agreement with the analytical approach.

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Type
research article
DOI
10.1007/s00542-017-3467-9
Web of Science ID

WOS:000423697800029

Author(s)
Bouchaala, Adam M. S.
Date Issued

2018-02-01

Publisher

SPRINGER

Published in
Microsystem Technologies-Micro-And Nanosystems-Information Storage And Processing Systems
Volume

24

Issue

2

Start page

1109

End page

1114

Subjects

Engineering, Electrical & Electronic

•

Nanoscience & Nanotechnology

•

Materials Science, Multidisciplinary

•

Physics, Applied

•

Engineering

•

Science & Technology - Other Topics

•

Materials Science

•

Physics

•

mass sensor

•

oscillators

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
STI  
Available on Infoscience
November 14, 2018
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/151423
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