Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins
2018
Details
Title
Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins
Author(s)
Pfeiffer, MHP ; Liu, JQ ; Raja, AS ; Morais, T ; Ghadiani, B ; Kippenberg, TJ
Published in
OPTICA
Volume
5
Issue
7
Pages
884-892
Date
2018
Other identifier(s)
View record in Web of Science
Laboratories
LPQM
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LPQM - Laboratory of Photonics and Quantum Measurements (STI/SB)
Scientific production and competences > SB - School of Basic Sciences > IPHYS - Institute of Physics > LPQM - Laboratory of Photonics and Quantum Measurements (STI/SB)
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Scientific production and competences > SB - School of Basic Sciences > IPHYS - Institute of Physics > LPQM - Laboratory of Photonics and Quantum Measurements (STI/SB)
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2018-11-08